The interview process was first class. Communication from HR was excellent across the board, and responses to my inquiries were swift and informative. The interview itself was quite casual. Management was encouraging, and willing to be candid about their experiences when I presented tough questions.
As an aside, note that pre-interview research into the company pays dividends. Management at ASML understands that candidates may not know everything about lithography machines. This is why enthusiasm for the product, and the industry as a whole will be of most benefit to you in the interview.