They used Microsoft meeting to start the interview. You need to introduce yourself at the beginning, and the HR will start to ask you several questions regarding your role. After that, you need to write some code and then they will test it.
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Other Platform Engineer interview reviews for ASML
Discussed project experience in detail based on CV, then asked about some knowledge of computer networks, operating systems and programming basis related to oop. Finally, there was a small IQ test.